OnToolTM Booster
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With it's new performance and compact design, the new OnTool Booster is setting new standards in vacuum technology for all applications. It is characterized by an extremely high pumping speed of 130 m3/h and an ultimate pressure of <1ยท10-5 mbar.
Applications
- Transfer chambers
- Load-lock chambers
- EUV lithography
- Solar cell coating
- Optical coating
- Surface finishing
- Simulation chambers
Customer value
- High-vacuum directly against atmosphere
- Modern, convenient design
- Extremly high pumping speed of 130 m3/h
- Does not require a backing pump
- For all clean appplications
- Can be used as either a stand-alone or backing pump
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