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OnTool^TM Booster 150 Accessories OnTool^TM Booster

Non-return valve DN 25 ISO-KF Sintering filter for sealing gas inlet G 1/8 Connection cable set TCP 3000 - OnTool Booster, TCP 3000-cooling water monitor Spacer, stainless steel, DN 50 ISO-KF Bellow, stainless steel, DN 50 ISO-KF TVF 005, venting valve, 24 VDC, normally closed TCP 3000, Turbo Controller TCP 3000 PB, Turbo Controller with integrated profibus interface TCP 3000 DN, Turbo Controller with integrated DeviceNet interface 208 V AC mains cable with UL plug, NEMA-HAN 3A, 3 m 230 V AC mains cable with Euro-style safety plug, VII-HAN 3A, 3 m TIC 001, Serial Interface Converter RS-232/RS-485 USB Converter to RS-485 interface Connection cable, plug M12, RJ 45 Connection cable, plug M12, RJ 45, length 20 m Venting flange DN 10 KF-G1/8"

OnTool^TM Booster

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Compact, powerful high-vacuum pump against atmosphere with a pumping speed of 130 m³/h and an ultimate pressure of < 1·10^-5 mbar. It can be employed in a wide variety of applications, either as a stand-alone pump or as a forepump for turbopumps for all clean applications.

OnTool^TM Booster 150

Accessories OnTool^TM Booster

Applications

Transfer chambers
Load-lock chambers
EUV lithography
Solar cell coating
Optical coating
Surface finishing
Simulation chambers
Light bulb manufacturing

Customer value

High-vacuum directly against atmosphere
Modern, convenient design
Extremly high pumping speed of 130 m³/h
Does not require a forepump
For all clean appplications
Can be used as either a stand-alone or forepump

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