Ion analysis and plasma monitoring

Special ion optics are combined with the QMG 422 mass spectrometer to analyze positive or negative ions. The PPM plasma monitor should be employed if the energy of the particles is to be quantified, as well, in addition to the mass spectrometer analysis.

• Ion beam analysis, SIMS
• Ion beam analysis, endpoint detection

• Plasma monitoring

Applications

• For SIMS applications
• Mass range: 1-2048 amu
• Surface analysis
• Plasma diagnostics with energy filter

Customer value

• Detection of positive and negative ions
• Measurement of radicals
• Broad dynamic range
• Fast measuring speed