Vacuum analysis

It is often not enough to merely know the pressure in a vacuum process. In many cases, it is equally important to be familiar with the composition of the residual gas. Mass spectrometers are typically employed for vacuum analysis. These instruments enable identification of contamination in the process chamber that would have a negative impact on product quality. This product line is segmented on the basis of typical applications an pressure ranges.

• Residual gas analysis in high vacuum
• Residual gas analysis in ultra high vacuum
• Gas analysis in the pressure range of < 10^-4 mbar
• Gas analysis in the pressure range of up to 10 mbar
• Gas analysis in the pressure range of up to 1 bar
• Ion analysis and plasma monitoring
• Individual components

• Mass spectrometer accessories